Abstract
We report a strategy to fabricate high-density random metallic nanopatterns with accurately controlled nanogaps defined by atomic-layer-deposition and self-assembled-monolayer processes for quantitative chemical and biological sensing with a record-high uniformity over a large area.
Original language | English |
---|---|
Article number | STh1H.7 |
Journal | Optics InfoBase Conference Papers |
Publication status | Published - 2021 |
Externally published | Yes |
Event | CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States Duration: 9 May 2021 → 14 May 2021 |