Preparation and ferroelectric properties of double-scale PZT composite piezoelectric thick film

Zhong Xia Duan; Jie Yuan; Quan Liang Zhao; Hong Mei Liu; Hai Bo Lin; Wen Tong Zhang; Mao Sheng Cao

doi:10.1088/0256-307X/25/4/083

Preparation and ferroelectric properties of double-scale PZT composite piezoelectric thick film

Zhong Xia Duan, Jie Yuan, Quan Liang Zhao, Hong Mei Liu, Hai Bo Lin, Wen Tong Zhang, Mao Sheng Cao^*

^*Corresponding author for this work

School of Material Science and Engineering

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

Dense and crack-free double-scale lead zirconate titanate (Pb(Zr _0.52Ti_0.48)O₃, PZT) composite piezoelectric thick films have been successfully fabricated on Au/Cr/SiO₂/Si substrates by a modified sol-gel method. The XRD analysis indicates that the thick film possesses a single-phase perovskite-type structure. The SEM micrograph shows that the surface is crack-free and the cross section is dense and clear. The thickness of the PZT thick film is about 4 μm. It also exhibits good ferroelectric properties, and has high direct current compression resistant properties. At the test frequency of 1kHz, the film has the coercive field of 50 kV/cm, the saturation polarization of 54 μC/cm² and the remnant polarization of 30 μC/cm².

Original language	English
Pages (from-to)	1472-1475
Number of pages	4
Journal	Chinese Physics Letters
Volume	25
Issue number	4
DOIs	https://doi.org/10.1088/0256-307X/25/4/083
Publication status	Published - 1 Apr 2008

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Duan, Z. X., Yuan, J., Zhao, Q. L., Liu, H. M., Lin, H. B., Zhang, W. T., & Cao, M. S. (2008). Preparation and ferroelectric properties of double-scale PZT composite piezoelectric thick film. Chinese Physics Letters, 25(4), 1472-1475. https://doi.org/10.1088/0256-307X/25/4/083

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title = "Preparation and ferroelectric properties of double-scale PZT composite piezoelectric thick film",

abstract = "Dense and crack-free double-scale lead zirconate titanate (Pb(Zr 0.52Ti0.48)O3, PZT) composite piezoelectric thick films have been successfully fabricated on Au/Cr/SiO2/Si substrates by a modified sol-gel method. The XRD analysis indicates that the thick film possesses a single-phase perovskite-type structure. The SEM micrograph shows that the surface is crack-free and the cross section is dense and clear. The thickness of the PZT thick film is about 4 μm. It also exhibits good ferroelectric properties, and has high direct current compression resistant properties. At the test frequency of 1kHz, the film has the coercive field of 50 kV/cm, the saturation polarization of 54 μC/cm2 and the remnant polarization of 30 μC/cm2.",

author = "Duan, {Zhong Xia} and Jie Yuan and Zhao, {Quan Liang} and Liu, {Hong Mei} and Lin, {Hai Bo} and Zhang, {Wen Tong} and Cao, {Mao Sheng}",

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T1 - Preparation and ferroelectric properties of double-scale PZT composite piezoelectric thick film

AU - Duan, Zhong Xia

AU - Yuan, Jie

AU - Zhao, Quan Liang

AU - Liu, Hong Mei

AU - Lin, Hai Bo

AU - Zhang, Wen Tong

AU - Cao, Mao Sheng

PY - 2008/4/1

Y1 - 2008/4/1

N2 - Dense and crack-free double-scale lead zirconate titanate (Pb(Zr 0.52Ti0.48)O3, PZT) composite piezoelectric thick films have been successfully fabricated on Au/Cr/SiO2/Si substrates by a modified sol-gel method. The XRD analysis indicates that the thick film possesses a single-phase perovskite-type structure. The SEM micrograph shows that the surface is crack-free and the cross section is dense and clear. The thickness of the PZT thick film is about 4 μm. It also exhibits good ferroelectric properties, and has high direct current compression resistant properties. At the test frequency of 1kHz, the film has the coercive field of 50 kV/cm, the saturation polarization of 54 μC/cm2 and the remnant polarization of 30 μC/cm2.

AB - Dense and crack-free double-scale lead zirconate titanate (Pb(Zr 0.52Ti0.48)O3, PZT) composite piezoelectric thick films have been successfully fabricated on Au/Cr/SiO2/Si substrates by a modified sol-gel method. The XRD analysis indicates that the thick film possesses a single-phase perovskite-type structure. The SEM micrograph shows that the surface is crack-free and the cross section is dense and clear. The thickness of the PZT thick film is about 4 μm. It also exhibits good ferroelectric properties, and has high direct current compression resistant properties. At the test frequency of 1kHz, the film has the coercive field of 50 kV/cm, the saturation polarization of 54 μC/cm2 and the remnant polarization of 30 μC/cm2.

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VL - 25

SP - 1472

EP - 1475

JO - Chinese Physics Letters

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ER -

Preparation and ferroelectric properties of double-scale PZT composite piezoelectric thick film

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