Preparation and electrical properties of Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanowhiskers by a hybrid sol-gel route

Q. L. Zhao, M. S. Cao*, J. Yuan, W. L. Song, R. Lu, D. W. Wang, D. Q. Zhang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanowhiskers (ZnOw-PZT) were successfully prepared on Pt/Cr/SiO2/Si substrates by a hybrid sol-gel method via spin-coating ZnOw suspension and PZT sol. Effects of annealing time and thickness on the corresponding orientation and crystallization of ZnOw-PZT films are investigated. XRD and SEM results show that ZnOw-PZT composite thick films have perovskite structure and high-quality film surface. The composite thick films also exhibit good ferroelectric and dielectric properties, which are close to those of PZT thick films. The remanent polarization, coercive field, dielectric constant and dielectric loss of ZnOw-PZT thick film with thickness of 2 μm are 24 μC/cm2, 177 kV/cm, 223 and 0.06, respectively. Moreover, the longitudinal piezoelectric coefficient is calculated to be 35 pm/V, which is comparable to that of PZT thick film.

Original languageEnglish
Pages (from-to)264-268
Number of pages5
JournalJournal of Alloys and Compounds
Volume492
Issue number1-2
DOIs
Publication statusPublished - 4 Mar 2010

Keywords

  • Electrical properties
  • Ferroelectrics
  • Sol-gel processes
  • X-ray diffraction

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