Abstract
High purity W tube is deposited on copper tube by chemical vapor deposition at atmospheric pressure. Using the high purity W tube as raw material, single-crystal W film was deposited on the single-crystal molybdenum rod by chemical transport deposition in vacuum condition. An analysis of the single-crystal characterization and crystal perfection of the W film were obtained is made by using XRD and EBSD. By using GDMS, the degree of purity of W film was determined. By conducting a test of nanoindentation and observation through SEM of the single film, relative results concerning its mechanical properties and features has been obtained. The results show that by using chemical transport deposition high, purity W single-crystal film of specific crystallographic orientation and perfect crystal can be deposited.
| Original language | English |
|---|---|
| Pages (from-to) | 258-263 |
| Number of pages | 6 |
| Journal | Rengong Jingti Xuebao/Journal of Synthetic Crystals |
| Volume | 39 |
| Issue number | SUPPL. |
| Publication status | Published - Jun 2010 |
Keywords
- Chemical vapor deposition
- Electron back-scatter diffraction
- Glow discharge mass spectrometry
- Nanoindentation
- Tungsten single crystal coating