Polarization control over deep ultraviolet light by subwavelength metallic gratings

Guoguo Kang, Xiaodi Tan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Using subwavelength structures to manipulate the polarization of deep ultraviolet (DUV) light is generally known as difficult with the current nano-fabrication technologies. To ease the fabrication, an aluminum grating with its period slightly smaller than the DUV wavelength was designed to exhibit an inverse polarizing effect. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment.

Original languageEnglish
Title of host publicationJSAP-OSA Joint Symposia, JSAP 2014
PublisherOptical Society of America (OSA)
ISBN (Electronic)9784863484436
DOIs
Publication statusPublished - 1 Sept 2014
EventJSAP-OSA Joint Symposia, JSAP 2014 - Sapporo, Hokkaido, Japan
Duration: 17 Sept 201420 Sept 2014

Publication series

NameJSAP-OSA Joint Symposia, JSAP 2014

Conference

ConferenceJSAP-OSA Joint Symposia, JSAP 2014
Country/TerritoryJapan
CitySapporo, Hokkaido
Period17/09/1420/09/14

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