Abstract
We demonstrated an integrated piezoelectric flow control system combined with microfabrication technology and piezoelectric actuation. In this system, the microchip is made of PDMS using soft lithography and standard replica molding techniques. Incorporated with piezoelectric actuator, the device achieve the automatic flow control with low voltage varying from 10V to 30V at adjustable frequency ranging from 1 Hz to 1 kHz.
| Original language | English |
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| Title of host publication | 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 |
| Pages | 1468-1472 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 2012 |
| Event | 2012 9th IEEE International Conference on Mechatronics and Automation, ICMA 2012 - Chengdu, China Duration: 5 Aug 2012 → 8 Aug 2012 |
Publication series
| Name | 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 |
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Conference
| Conference | 2012 9th IEEE International Conference on Mechatronics and Automation, ICMA 2012 |
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| Country/Territory | China |
| City | Chengdu |
| Period | 5/08/12 → 8/08/12 |
Keywords
- Flow control
- Microfluidic chips
- Piezoelectric ceramic
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Hu, X., Li, J., & Li, Q. (2012). Piezoelectric flow control system based on microfluidic chip. In 2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012 (pp. 1468-1472). Article 6284353 (2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012). https://doi.org/10.1109/ICMA.2012.6284353