Performance analysis and experiment of Love wave sensor

Pu Miao; Feng Li; Ping Zhang; Yong Shun Liu; Xiao Meng Bi; Yi Hui Wu

doi:10.3788/OPE.20111910.2457

Performance analysis and experiment of Love wave sensor

Pu Miao^*, Feng Li, Ping Zhang, Yong Shun Liu, Xiao Meng Bi, Yi Hui Wu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

In order to obtain a high sensitive Love wave mass sensor, the Love wave propagation characteristics in a layered structure consisting of a ST-quartz and a silica were investigated theoretically and experimentally on the basis of acoustic dynamics, the wave equation for the layered structure was analyzed and its displacement and the dispersion curves were obtained by calculation. According to the computing results, a Love wave sensor with a SiO₂ waveguide layer was designed and fabricated on a ST-quartz substrate by MEMS processes and its sensitivity was tested by electro-deposition experiment. The results indicate that the mass sensitivity of the device is 100 cm²/g and the detection limit is 3.65 ng, which meets the demand of biochemical detection for higher sensitivity basically.

Original language	English
Pages (from-to)	2457-2463
Number of pages	7
Journal	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
Volume	19
Issue number	10
DOIs	https://doi.org/10.3788/OPE.20111910.2457
Publication status	Published - Oct 2011
Externally published	Yes

Keywords

Cyclic voltammetry
Dispersion curve
Love wave mass sensor
Mass sensitivity

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10.3788/OPE.20111910.2457

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title = "Performance analysis and experiment of Love wave sensor",

abstract = "In order to obtain a high sensitive Love wave mass sensor, the Love wave propagation characteristics in a layered structure consisting of a ST-quartz and a silica were investigated theoretically and experimentally on the basis of acoustic dynamics, the wave equation for the layered structure was analyzed and its displacement and the dispersion curves were obtained by calculation. According to the computing results, a Love wave sensor with a SiO2 waveguide layer was designed and fabricated on a ST-quartz substrate by MEMS processes and its sensitivity was tested by electro-deposition experiment. The results indicate that the mass sensitivity of the device is 100 cm2/g and the detection limit is 3.65 ng, which meets the demand of biochemical detection for higher sensitivity basically.",

keywords = "Cyclic voltammetry, Dispersion curve, Love wave mass sensor, Mass sensitivity",

author = "Pu Miao and Feng Li and Ping Zhang and Liu, {Yong Shun} and Bi, {Xiao Meng} and Wu, {Yi Hui}",

year = "2011",

month = oct,

doi = "10.3788/OPE.20111910.2457",

language = "English",

volume = "19",

pages = "2457--2463",

journal = "Guangxue Jingmi Gongcheng/Optics and Precision Engineering",

issn = "1004-924X",

publisher = "Chinese Academy of Sciences",

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TY - JOUR

T1 - Performance analysis and experiment of Love wave sensor

AU - Miao, Pu

AU - Li, Feng

AU - Zhang, Ping

AU - Liu, Yong Shun

AU - Bi, Xiao Meng

AU - Wu, Yi Hui

PY - 2011/10

Y1 - 2011/10

N2 - In order to obtain a high sensitive Love wave mass sensor, the Love wave propagation characteristics in a layered structure consisting of a ST-quartz and a silica were investigated theoretically and experimentally on the basis of acoustic dynamics, the wave equation for the layered structure was analyzed and its displacement and the dispersion curves were obtained by calculation. According to the computing results, a Love wave sensor with a SiO2 waveguide layer was designed and fabricated on a ST-quartz substrate by MEMS processes and its sensitivity was tested by electro-deposition experiment. The results indicate that the mass sensitivity of the device is 100 cm2/g and the detection limit is 3.65 ng, which meets the demand of biochemical detection for higher sensitivity basically.

AB - In order to obtain a high sensitive Love wave mass sensor, the Love wave propagation characteristics in a layered structure consisting of a ST-quartz and a silica were investigated theoretically and experimentally on the basis of acoustic dynamics, the wave equation for the layered structure was analyzed and its displacement and the dispersion curves were obtained by calculation. According to the computing results, a Love wave sensor with a SiO2 waveguide layer was designed and fabricated on a ST-quartz substrate by MEMS processes and its sensitivity was tested by electro-deposition experiment. The results indicate that the mass sensitivity of the device is 100 cm2/g and the detection limit is 3.65 ng, which meets the demand of biochemical detection for higher sensitivity basically.

KW - Cyclic voltammetry

KW - Dispersion curve

KW - Love wave mass sensor

KW - Mass sensitivity

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DO - 10.3788/OPE.20111910.2457

M3 - Article

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SN - 1004-924X

VL - 19

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JO - Guangxue Jingmi Gongcheng/Optics and Precision Engineering

JF - Guangxue Jingmi Gongcheng/Optics and Precision Engineering

IS - 10

ER -

Performance analysis and experiment of Love wave sensor

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Keywords

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