Oriented Growth of PZT thick film embedded with PZT nanoparticles

Zhong Xia Duan; Jie Yuan; Quan Liang Zhao; Ran Lu; Mao Sheng Cao

Oriented Growth of PZT thick film embedded with PZT nanoparticles

Zhong Xia Duan^*, Jie Yuan, Quan Liang Zhao, Ran Lu, Mao Sheng Cao

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb (Zr_0.52Ti_0.48) O₃, PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO₂/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700°C for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700°C for 5 min has the strongest (100) orientation degree, which is 82.3%.

Original language	English
Pages (from-to)	232-236
Number of pages	5
Journal	Journal of Harbin Institute of Technology (New Series)
Volume	16
Issue number	2
Publication status	Published - Apr 2009

Keywords

Oriented growth
PZT
Sol-gel
Thick film

Cite this

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title = "Oriented Growth of PZT thick film embedded with PZT nanoparticles",

abstract = "This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb (Zr0.52Ti0.48) O3, PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700°C for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700°C for 5 min has the strongest (100) orientation degree, which is 82.3%.",

keywords = "Oriented growth, PZT, Sol-gel, Thick film",

author = "Duan, {Zhong Xia} and Jie Yuan and Zhao, {Quan Liang} and Ran Lu and Cao, {Mao Sheng}",

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TY - JOUR

T1 - Oriented Growth of PZT thick film embedded with PZT nanoparticles

AU - Duan, Zhong Xia

AU - Yuan, Jie

AU - Zhao, Quan Liang

AU - Lu, Ran

AU - Cao, Mao Sheng

PY - 2009/4

Y1 - 2009/4

N2 - This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb (Zr0.52Ti0.48) O3, PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700°C for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700°C for 5 min has the strongest (100) orientation degree, which is 82.3%.

AB - This paper reports that dense and crack-free (100) oriented lead zirconate titanate (Pb (Zr0.52Ti0.48) O3, PZT) thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive. The thick film possesses single-phase perovskite structure and perfectly (100) oriented. The (100) orientation degree of the PZT films strongly depended on annealing time and for the 4μm-thick PZT film which was annealed at 700°C for 5 min is the largest. The (100) orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing. The 3μm-thick PZT thick film which was annealed at 700°C for 5 min has the strongest (100) orientation degree, which is 82.3%.

KW - Oriented growth

KW - PZT

KW - Sol-gel

KW - Thick film

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M3 - Article

AN - SCOPUS:66349131725

SN - 1005-9113

VL - 16

SP - 232

EP - 236

JO - Journal of Harbin Institute of Technology (New Series)

JF - Journal of Harbin Institute of Technology (New Series)

IS - 2

ER -

Oriented Growth of PZT thick film embedded with PZT nanoparticles

Abstract

Keywords

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