Abstract
In order to solve the problem of online height detection during the processing of micro electro mechanical system (MEMS) devices, an online height detection method of MEMS devices based on laser light section was proposed. Firstly, an online height detection system was established to verify the validity of laser light section; secondly, based on threshold segmentation, mathematical morphology, progressive scanning method and weighted least squares method, a fast method for extracting centric line of laser line was proposed. Experimental results show that the maximum mean error and mean square deviation of the online height detection system are -6.38 μm and 1.87 μm, respectively, and the detection time of one height measurement is 1.03 s. So the laser light section can be employed in online height detection of MEMS devices.
| Original language | English |
|---|---|
| Pages (from-to) | 422-428 |
| Number of pages | 7 |
| Journal | Nanotechnology and Precision Engineering |
| Volume | 10 |
| Issue number | 5 |
| Publication status | Published - Sept 2012 |
Keywords
- Image detection
- Laser light section
- MEMS
- Online height detection