TY - GEN
T1 - One novel design method of the millimeter-wave MEMS filter
AU - Huaizhi, Yang
AU - Houjun, Sun
AU - Weihua, Yu
AU - Xin, Lv
PY - 2007
Y1 - 2007
N2 - In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.
AB - In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.
KW - FEM
KW - Filter
KW - MEMS
UR - http://www.scopus.com/inward/record.url?scp=34748887739&partnerID=8YFLogxK
U2 - 10.1109/ICMMT.2007.381416
DO - 10.1109/ICMMT.2007.381416
M3 - Conference contribution
AN - SCOPUS:34748887739
SN - 1424410495
SN - 9781424410491
T3 - 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07
BT - 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07
T2 - 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07
Y2 - 18 April 2007 through 21 April 2007
ER -