One novel design method of the millimeter-wave MEMS filter

Yang Huaizhi; Sun Houjun; Yu Weihua; Lv Xin

doi:10.1109/ICMMT.2007.381416

One novel design method of the millimeter-wave MEMS filter

Yang Huaizhi^*, Sun Houjun, Yu Weihua, Lv Xin

^*Corresponding author for this work

School of Integrated Circuits and Electronics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.

Original language	English
Title of host publication	2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07
DOIs	https://doi.org/10.1109/ICMMT.2007.381416
Publication status	Published - 2007
Event	2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07 - Guilin, China Duration: 18 Apr 2007 → 21 Apr 2007

Publication series

Name	2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07

Conference

Conference	2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07
Country/Territory	China
City	Guilin
Period	18/04/07 → 21/04/07

Keywords

FEM
Filter
MEMS

Access to Document

10.1109/ICMMT.2007.381416

Cite this

Huaizhi, Y., Houjun, S., Weihua, Y., & Xin, L. (2007). One novel design method of the millimeter-wave MEMS filter. In 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07 Article 4266175 (2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07). https://doi.org/10.1109/ICMMT.2007.381416

@inproceedings{221626ad2cd74e899cfa9fdb62482c50,

title = "One novel design method of the millimeter-wave MEMS filter",

abstract = "In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.",

keywords = "FEM, Filter, MEMS",

author = "Yang Huaizhi and Sun Houjun and Yu Weihua and Lv Xin",

year = "2007",

doi = "10.1109/ICMMT.2007.381416",

language = "English",

isbn = "1424410495",

series = "2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07",

booktitle = "2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07",

note = "2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07 ; Conference date: 18-04-2007 Through 21-04-2007",

}

Huaizhi, Y, Houjun, S, Weihua, Y & Xin, L 2007, One novel design method of the millimeter-wave MEMS filter. in 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07., 4266175, 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07, 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07, Guilin, China, 18/04/07. https://doi.org/10.1109/ICMMT.2007.381416

One novel design method of the millimeter-wave MEMS filter. / Huaizhi, Yang; Houjun, Sun; Weihua, Yu et al.
2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07. 2007. 4266175 (2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - One novel design method of the millimeter-wave MEMS filter

AU - Huaizhi, Yang

AU - Houjun, Sun

AU - Weihua, Yu

AU - Xin, Lv

PY - 2007

Y1 - 2007

N2 - In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.

AB - In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.

KW - FEM

KW - Filter

KW - MEMS

UR - http://www.scopus.com/inward/record.url?scp=34748887739&partnerID=8YFLogxK

U2 - 10.1109/ICMMT.2007.381416

DO - 10.1109/ICMMT.2007.381416

M3 - Conference contribution

AN - SCOPUS:34748887739

SN - 1424410495

SN - 9781424410491

T3 - 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07

BT - 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07

T2 - 2007 International Conference on Microwave and Millimeter Wave Technology, ICMMT '07

Y2 - 18 April 2007 through 21 April 2007

ER -

One novel design method of the millimeter-wave MEMS filter

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Conference

Keywords

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