Numerical study on rectangular microhollow cathode discharge

Rectangular microhollow cathode discharge in argon is investigated by using two-dimensional time-dependent self-consistent fluid model. The electric potential, electric field, particle density, and mean electron energy are calculated. The results show that hollow cathode effect can be onset in the present configuration, with strong electric field and high mean electron energy in the cathode fall while high density and quasineutral plasma in the negative glow. The potential well and electric filed reversal are formed in the negative glow region. It is suggested that the presence of large electron diffusion flux necessitates the field reversal and potential well.