Numerical simulation of concentration field during the growth of single crystal Si in a cusp magnetic field

Yingwei Wang*, Jinghe Liu, Haobo Cheng, Jianli Li

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In order to control the size of crystal, the content of foreign metal impurities, the uniform distribution of oxygen and doped elements, a new crystal growth method, which is the combination of cusp magnetic field and Czochralski method, is proposed. Based on the physical and mathematical model for the growth system of Si crystal, the non-dimensional form treatment and find the solution the help of boundary condition established, a numerical simulation on concentration field in the melt and the crystal is investigated by using FDM (finite difference method) during the growth of Si single crystal in the cusp magnetic. Simulation results indicate that the use of cusp magnetic field in the growth of Si crystal enables to achieve the distribution uniformity of oxygen concentration in the crystal by controlling the concentration and distribution of oxygen element in the melt and at the solid-liquid interface through changing the density of magnetic field, rotating speed of the crystal and crucible, and radius of the crystal.

Original languageEnglish
Pages (from-to)133-139
Number of pages7
JournalKuei Suan Jen Hsueh Pao/ Journal of the Chinese Ceramic Society
Volume33
Issue number2
Publication statusPublished - Feb 2005
Externally publishedYes

Keywords

  • Concentration field
  • Cusp magnetic field
  • Czochralski method
  • Finite difference method
  • Numerical simulation
  • Silicon single crystal

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