Novel structure of double-H tuning fork for dual-axis quartz micro-electro-mechanical system angular rate sensor

Ke Zhao, Lihui Feng, Qianqian Wang, Fang Cui, Yunan Sun

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1 Citation (Scopus)

Abstract

A novel structure of a double-H tuning fork for an angular rate sensor, which can detect two-axial angular rates on a single quartz chip, is proposed in this article. Multiple sensing forks, which are separated from driving forks, guarantee the sensitivities of the two-axial effect and suppress couplings among each mode. Simulation with the finite element method (FEM) is used to analyze the resonance frequencies, electrode distributions, and outputs of this structure. The results show that this double-H tuning fork resonator can be used as an angular rate sensor to detect two-axial angular rates effectively.

Original languageEnglish
Article number090207
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume52
Issue number9
DOIs
Publication statusPublished - Sept 2013

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Zhao, K., Feng, L., Wang, Q., Cui, F., & Sun, Y. (2013). Novel structure of double-H tuning fork for dual-axis quartz micro-electro-mechanical system angular rate sensor. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 52(9), Article 090207. https://doi.org/10.7567/JJAP.52.090207