Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

Lihui Feng; Wenjun Gu; Ke Zhao; Yu Nan Sun; Fang Cui; Jianmin Cui; Aiying Yang

doi:10.1007/s00542-014-2113-z

Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

Lihui Feng^*, Wenjun Gu, Ke Zhao, Yu Nan Sun, Fang Cui, Jianmin Cui, Aiying Yang

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.

Original language	English
Pages (from-to)	2231-2237
Number of pages	7
Journal	Microsystem Technologies
Volume	20
Issue number	12
DOIs	https://doi.org/10.1007/s00542-014-2113-z
Publication status	Published - 22 Feb 2014

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Feng, L., Gu, W., Zhao, K., Sun, Y. N., Cui, F., Cui, J., & Yang, A. (2014). Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope. Microsystem Technologies, 20(12), 2231-2237. https://doi.org/10.1007/s00542-014-2113-z

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abstract = "A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.",

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AU - Gu, Wenjun

AU - Zhao, Ke

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AU - Cui, Fang

AU - Cui, Jianmin

AU - Yang, Aiying

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AB - A new self-compensation method is proposed in this paper. The impedance of a quartz tuning fork changes along with the temperature. A digital driving circuit is designed so that the frequency can be adjusted by controlling the phase. The relationship between the driving amplitude and the temperature is captured in a digital circuit, which can reflect the temperature information. As the relationship is nonlinear, after third-order fitting, the temperature has a precision of 2.356 °C. Finally, the bias stability is optimized and the drift decreases to 1.7 %.

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Novel self‑compensation method to lower the temperature drift of a quartz MEMS gyroscope

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