Novel adaptive phase-shifting interferometry

Weirui Zhao*, Genrui Cao, Junqi Ma

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

An adaptive phase-shifting interferometry, insensitive to the disturbance of constant term of phase perturbations induced by environmental vibration and air turbulence is introduced. Where high frequency intensity modulation of laser beam and phase lock-in as well as the closed loop control techniques are used. The wobble of interference fringes can be compensated, and sequentially be locked at arbitrarily chosen phases for phase-shifting testing. Comparing with other similar techniques, here the depth of signal modulation is not limited by the magnitude of optical path difference (OPD) and the fringe contrast is not reduced by the modulation, hence a high SNR can be obtained. The experimental results and conclusions are presented.

Original languageEnglish
Pages (from-to)360-364
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4231
DOIs
Publication statusPublished - 2000
EventAdvanced Optical Manufacturing and Testing Technology 2000 - Chengdu, China
Duration: 1 Nov 20003 Nov 2000

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