Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer

Yuan Yang, Yong Deng, Yidong Tan, Zhenyu Huang, Yong Zhang, Yun Wang, Shulian Zhang*

*Corresponding author for this work

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Abstract

After a long-term research, the birefringence-Zeeman dual-frequency (BZDF) laser has entered the practical stage, and the BZDF laser interferometer has more powerful displacement and size measurement functions, especially the near-zero nonlinearity. This paper theoretically analyzes the mechanism of the near-zero nonlinear error, including theoretical simulation and experimental measurements. The measurement results show that the nonlinear error of the BZDF laser interferometer is only 0.3 nm, which is one order of magnitude smaller than that of traditional Zeeman dual-frequency (ZDF) laser interferometer. It has broad application prospects in the field of ultra-precision metrology.

Original languageEnglish
Pages (from-to)264-268
Number of pages5
JournalOptics Communications
Volume436
DOIs
Publication statusPublished - 1 Apr 2019
Externally publishedYes

Keywords

  • Birefringence-Zeeman dual-frequency laser
  • Dual-frequency laser interferometer
  • Frequency aliasing
  • Nonlinear error

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Yang, Y., Deng, Y., Tan, Y., Huang, Z., Zhang, Y., Wang, Y., & Zhang, S. (2019). Nonlinear error analysis and experimental measurement of Birefringence-Zeeman dual-frequency laser interferometer. Optics Communications, 436, 264-268. https://doi.org/10.1016/j.optcom.2018.12.030