Nitrogen dioxide sensing properties and mechanism of copper phthalocyanine film

Cheng Jun Qiu; Yan Wei Dou; Quan Liang Zhao; Wei Qu; Jie Yuan; Yan Mei Sun; Mao Sheng Cao

doi:10.1088/0256-307X/25/10/019

Nitrogen dioxide sensing properties and mechanism of copper phthalocyanine film

Cheng Jun Qiu, Yan Wei Dou, Quan Liang Zhao, Wei Qu, Jie Yuan, Yan Mei Sun, Mao Sheng Cao^*

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Copper phthalocyanine film, a p-type organic semiconductor, is synthesized by vacuum sublimation and its surface morphology is characterized by SEM. A silicon-based copper phthalocyanine film gas sensor for NO₂ detection is fabricated by MEMS technology. The results show that the resistance and sensitivity of copper phthalocyanine film decrease obviously as the NO ₂ concentration increases from 0 ppm to 100ppm. However, the sensitivity nearly keeps a constant of 0.158 between 30 ppm and 70 ppm. The best working temperature of the gas sensor is 90° G for NO₂ gas concentrations of 10 ppm, 20 ppm and 30 ppm, which is much lower than that of general metal oxide gas sensor.

Original language	English
Pages (from-to)	3590-3592
Number of pages	3
Journal	Chinese Physics Letters
Volume	25
Issue number	10
DOIs	https://doi.org/10.1088/0256-307X/25/10/019
Publication status	Published - 1 Oct 2008

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title = "Nitrogen dioxide sensing properties and mechanism of copper phthalocyanine film",

abstract = "Copper phthalocyanine film, a p-type organic semiconductor, is synthesized by vacuum sublimation and its surface morphology is characterized by SEM. A silicon-based copper phthalocyanine film gas sensor for NO2 detection is fabricated by MEMS technology. The results show that the resistance and sensitivity of copper phthalocyanine film decrease obviously as the NO 2 concentration increases from 0 ppm to 100ppm. However, the sensitivity nearly keeps a constant of 0.158 between 30 ppm and 70 ppm. The best working temperature of the gas sensor is 90° G for NO2 gas concentrations of 10 ppm, 20 ppm and 30 ppm, which is much lower than that of general metal oxide gas sensor.",

author = "Qiu, {Cheng Jun} and Dou, {Yan Wei} and Zhao, {Quan Liang} and Wei Qu and Jie Yuan and Sun, {Yan Mei} and Cao, {Mao Sheng}",

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T1 - Nitrogen dioxide sensing properties and mechanism of copper phthalocyanine film

AU - Qiu, Cheng Jun

AU - Dou, Yan Wei

AU - Zhao, Quan Liang

AU - Qu, Wei

AU - Yuan, Jie

AU - Sun, Yan Mei

AU - Cao, Mao Sheng

PY - 2008/10/1

Y1 - 2008/10/1

N2 - Copper phthalocyanine film, a p-type organic semiconductor, is synthesized by vacuum sublimation and its surface morphology is characterized by SEM. A silicon-based copper phthalocyanine film gas sensor for NO2 detection is fabricated by MEMS technology. The results show that the resistance and sensitivity of copper phthalocyanine film decrease obviously as the NO 2 concentration increases from 0 ppm to 100ppm. However, the sensitivity nearly keeps a constant of 0.158 between 30 ppm and 70 ppm. The best working temperature of the gas sensor is 90° G for NO2 gas concentrations of 10 ppm, 20 ppm and 30 ppm, which is much lower than that of general metal oxide gas sensor.

AB - Copper phthalocyanine film, a p-type organic semiconductor, is synthesized by vacuum sublimation and its surface morphology is characterized by SEM. A silicon-based copper phthalocyanine film gas sensor for NO2 detection is fabricated by MEMS technology. The results show that the resistance and sensitivity of copper phthalocyanine film decrease obviously as the NO 2 concentration increases from 0 ppm to 100ppm. However, the sensitivity nearly keeps a constant of 0.158 between 30 ppm and 70 ppm. The best working temperature of the gas sensor is 90° G for NO2 gas concentrations of 10 ppm, 20 ppm and 30 ppm, which is much lower than that of general metal oxide gas sensor.

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VL - 25

SP - 3590

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JO - Chinese Physics Letters

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Nitrogen dioxide sensing properties and mechanism of copper phthalocyanine film

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