Nanometer profile measurement of aspheric surface using scanning deflectometry and rotating autocollimator: Self-calibration method of autocollimator

Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationProceedings - ASPE/ASPEN Summer Topical Meeting
Subtitle of host publicationManufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces
PublisherAmerican Society for Precision Engineering, ASPE
Pages121-125
Number of pages5
ISBN (Print)9781887706650
Publication statusPublished - 2014
EventJoint Meeting of the American Society for Precision Engineering (ASPE) and the Asian Society for Precision Engineering (ASPEN) on Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces - 2014 Summer Topical Meeting - Kohala Coast, HI, United States
Duration: 26 Jun 201427 Jun 2014

Publication series

NameProceedings - ASPE/ASPEN Summer Topical Meeting: Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces

Conference

ConferenceJoint Meeting of the American Society for Precision Engineering (ASPE) and the Asian Society for Precision Engineering (ASPEN) on Manufacture and Metrology of Freeform and Off-Axis Aspheric Surfaces - 2014 Summer Topical Meeting
Country/TerritoryUnited States
CityKohala Coast, HI
Period26/06/1427/06/14

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