Nanoelectromechanical switches by controlled switchable cracking

Qiang Luo, Zhe Guo, Houbing Huang, Qiming Zou, Xiangwei Jiang, Shuai Zhang, Hongjuan Wang, Min Song, Bao Zhang, Hong Chen, Haoshuang Gu, Genquan Han, Xiaofei Yang, Xuecheng Zou, Kai You Wang, Zhiqi Liu, Jeongmin Hong, Ramamoorthy Ramesh, Long You*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Nanoelectromechanical (NEM) switches could surmount the Boltzmann Tyranny in the current charge-carrier systems. However, thus far, practical implementations of the NEM systems have been hindered by the complicated fabrication processes of forming the extremely small air gap. Here, we realize a very simple NEM switch by exploiting a switchable nanocrack controlled by an electric field in a metallic alloy-ferroelectric heterostructure. The crack is formed in a controllable manner in terms of its initiation, location, and orientation through a bridge-like structure. The open and closed states of the crack are programmed under a cyclic electric field. In addition, an abrupt switching behavior with a nonvolatile high ON/OFF current ratio (>107) is measured owing to the near-zero OFF-state leakage current across the crack. This simple nanocrack switch presents a novel opportunity in the NEM systems, which can be used as a new nonvolatile random-access memory and logic.

Original languageEnglish
Article number8718996
Pages (from-to)1209-1212
Number of pages4
JournalIEEE Electron Device Letters
Volume40
Issue number7
DOIs
Publication statusPublished - Jul 2019

Keywords

  • Nanoelectromechanical switch
  • controlled nanocrack
  • electric field control
  • nonvolatile memory

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