Multi-axis electrothermal scanning micromirror with low driving voltage

Kemiao Jia; Huikai Xie

doi:10.1109/CLEO.2007.4452788

Multi-axis electrothermal scanning micromirror with low driving voltage

Kemiao Jia^*, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, 2007, CLEO 2007
DOIs	https://doi.org/10.1109/CLEO.2007.4452788
Publication status	Published - 2007
Externally published	Yes
Event	Conference on Lasers and Electro-Optics, 2007, CLEO 2007 - Baltimore, MD, United States Duration: 6 May 2007 → 11 May 2007

Publication series

Name	Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Conference

Conference	Conference on Lasers and Electro-Optics, 2007, CLEO 2007
Country/Territory	United States
City	Baltimore, MD
Period	6/05/07 → 11/05/07

Access to Document

10.1109/CLEO.2007.4452788

Cite this

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title = "Multi-axis electrothermal scanning micromirror with low driving voltage",

abstract = "This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.",

author = "Kemiao Jia and Huikai Xie",

year = "2007",

doi = "10.1109/CLEO.2007.4452788",

language = "English",

isbn = "9781557528346",

series = "Conference on Lasers and Electro-Optics, 2007, CLEO 2007",

booktitle = "Conference on Lasers and Electro-Optics, 2007, CLEO 2007",

note = "Conference on Lasers and Electro-Optics, 2007, CLEO 2007 ; Conference date: 06-05-2007 Through 11-05-2007",

}

TY - GEN

T1 - Multi-axis electrothermal scanning micromirror with low driving voltage

AU - Jia, Kemiao

AU - Xie, Huikai

PY - 2007

Y1 - 2007

N2 - This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.

AB - This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.

UR - http://www.scopus.com/inward/record.url?scp=82955207245&partnerID=8YFLogxK

U2 - 10.1109/CLEO.2007.4452788

DO - 10.1109/CLEO.2007.4452788

M3 - Conference contribution

AN - SCOPUS:82955207245

SN - 9781557528346

T3 - Conference on Lasers and Electro-Optics, 2007, CLEO 2007

BT - Conference on Lasers and Electro-Optics, 2007, CLEO 2007

T2 - Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Y2 - 6 May 2007 through 11 May 2007

ER -

Multi-axis electrothermal scanning micromirror with low driving voltage

Abstract

Publication series

Conference

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Cite this