Miniaturizing fourier transform spectrometer with an electrothermal micromirror

Wei Wang; Sean R. Samuelson; Jiapin Chen; Huikai Xie

doi:10.1109/LPT.2015.2423637

Miniaturizing fourier transform spectrometer with an electrothermal micromirror

Wei Wang, Sean R. Samuelson, Jiapin Chen, Huikai Xie

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

An amplitude-division Fourier transform spectroscopy system has been constructed. The system design hinges on an electrothermally actuated micromirror with large piston motion. The micromirror is composed of electrothermal mesh actuators and can generate up to 95 μm usable linear optical path difference of the system at only 0.8 V_dc. A custom electrical system is developed to control the micromirror and data processing is implemented to extract the spectrum from interferograms. The system can achieve a spectral resolution of 5 nm at 532 nm.

Original language	English
Article number	7087333
Pages (from-to)	1418-1421
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	27
Issue number	13
DOIs	https://doi.org/10.1109/LPT.2015.2423637
Publication status	Published - 1 Jul 2015
Externally published	Yes

Keywords

Electrothermal actuator
Fourier Transform Spectroscopy
MEMS Mirror

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10.1109/LPT.2015.2423637

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abstract = "An amplitude-division Fourier transform spectroscopy system has been constructed. The system design hinges on an electrothermally actuated micromirror with large piston motion. The micromirror is composed of electrothermal mesh actuators and can generate up to 95 μm usable linear optical path difference of the system at only 0.8 Vdc. A custom electrical system is developed to control the micromirror and data processing is implemented to extract the spectrum from interferograms. The system can achieve a spectral resolution of 5 nm at 532 nm.",

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Miniaturizing fourier transform spectrometer with an electrothermal micromirror

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Keywords

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