@inproceedings{1457d5db677b459c97af5037ca8a2e4d,
title = "Miniature photoacoustic imaging probe using MEMS scanning micromirror",
abstract = "This paper presents the design and characterization of an electrothermally actuated high-fill-factor tip-tilt-piston (TTP) micromirror and its application to three-dimensional (3D) photoacoustic imaging (PAI). The micromirror chip is 2mm x 2mm. It has large scan range (>25°) at low driving voltage (∼4V) and can perform fast raster scanning. A miniature PAI probe with a diameter of 11.5 mm has been developed. The 3D images of in vivo human blood vessels are successfully obtained using this MEMS-based PAI system.",
keywords = "Bimorph, Electrothermal, Micromirror, Photoacoustic imaging, Tip-tilt piston",
author = "Wenjun Liao and Wenjing Liu and Jingjing Sun and Yiping Zhu and Lei Wu and Huikai Xie and Lei Xi and Huabei Jiang",
year = "2011",
doi = "10.1109/OMEMS.2011.6031113",
language = "English",
isbn = "9781457703362",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "115--116",
booktitle = "Proceedings - OMN2011",
note = "16th International Conference on Optical MEMS and Nanophotonics, OMN2011 ; Conference date: 08-08-2011 Through 11-08-2011",
}