TY - JOUR
T1 - Microstructure and growth mechanism of tungsten carbide coatings by atmospheric CVD
AU - Zhang, Huicong
AU - Yu, Xiaodong
AU - Nie, Zhihua
AU - Tan, Chengwen
AU - Wang, Fuchi
AU - Cai, Huaijian
AU - Li, Ying
AU - Wang, Fang
AU - Cai, Hongnian
N1 - Publisher Copyright:
© 2018
PY - 2018/6/25
Y1 - 2018/6/25
N2 - A tungsten carbide coating was prepared by atmospheric chemical vapor deposition (CVD) with tungsten hexafluoride (WF6), hydrogen, and dimethyl ether (DME) as the reaction gases, under a dimethyl ether partial pressure (PDME) of 3.2–21.0 kPa and a temperature of 550–600 °C. The phase compositions of the coatings are W2C + W and W3C + W, and it is found that when PDME is low, the coating has a lamellar structure, but at a high PDME, the lamellar structure and fibrous tissue are simultaneously present in the scanning electron microscope (SEM) image. In the latter case, no delamination was found, which was visible at a low PDME. In addition, as the PDME increases, the deposition rate of the coating decreases, and ultimately, the coating cannot continue to grow. The growth model of the tungsten carbide coating based on the kinetics of the chemical vapor deposition of tungsten by the hydrogen reduction of tungsten hexafluoride was proposed, and the influences of PDME and temperature on the coatings were discussed and the orientation relationship between W and W2C in high resolution transmission electron microscopy (HRTEM) was analyzed.
AB - A tungsten carbide coating was prepared by atmospheric chemical vapor deposition (CVD) with tungsten hexafluoride (WF6), hydrogen, and dimethyl ether (DME) as the reaction gases, under a dimethyl ether partial pressure (PDME) of 3.2–21.0 kPa and a temperature of 550–600 °C. The phase compositions of the coatings are W2C + W and W3C + W, and it is found that when PDME is low, the coating has a lamellar structure, but at a high PDME, the lamellar structure and fibrous tissue are simultaneously present in the scanning electron microscope (SEM) image. In the latter case, no delamination was found, which was visible at a low PDME. In addition, as the PDME increases, the deposition rate of the coating decreases, and ultimately, the coating cannot continue to grow. The growth model of the tungsten carbide coating based on the kinetics of the chemical vapor deposition of tungsten by the hydrogen reduction of tungsten hexafluoride was proposed, and the influences of PDME and temperature on the coatings were discussed and the orientation relationship between W and W2C in high resolution transmission electron microscopy (HRTEM) was analyzed.
KW - Chemical vapor deposition (CVD)
KW - Coating
KW - Fibrous tissue
KW - Lamellar structure
KW - Phase composition
KW - Tungsten carbide
UR - http://www.scopus.com/inward/record.url?scp=85043386802&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2018.03.011
DO - 10.1016/j.surfcoat.2018.03.011
M3 - Article
AN - SCOPUS:85043386802
SN - 0257-8972
VL - 344
SP - 85
EP - 92
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -