MEMS mirrors for LiDAR: A review

Dingkang Wang; Connor Watkins; Huikai Xie

doi:10.3390/MI11050456

MEMS mirrors for LiDAR: A review

Dingkang Wang, Connor Watkins, Huikai Xie^*

^*Corresponding author for this work

University of Florida

Research output: Contribution to journal › Review article › peer-review

286 Citations (Scopus)

Abstract

In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.

Original language	English
Article number	456
Journal	Micromachines
Volume	11
Issue number	5
DOIs	https://doi.org/10.3390/MI11050456
Publication status	Published - 1 May 2020
Externally published	Yes

Keywords

Laser scanning
LiDAR
Mems mirror
Micromirror
Optical scanner

Access to Document

10.3390/MI11050456

Cite this

@article{d060ee73b45147828cb369b361ab10d8,

title = "MEMS mirrors for LiDAR: A review",

abstract = "In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.",

keywords = "Laser scanning, LiDAR, Mems mirror, Micromirror, Optical scanner",

author = "Dingkang Wang and Connor Watkins and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2020 by the authors.",

year = "2020",

month = may,

day = "1",

doi = "10.3390/MI11050456",

language = "English",

volume = "11",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "5",

}

TY - JOUR

T1 - MEMS mirrors for LiDAR

T2 - A review

AU - Wang, Dingkang

AU - Watkins, Connor

AU - Xie, Huikai

PY - 2020/5/1

Y1 - 2020/5/1

N2 - In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.

AB - In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.

KW - Laser scanning

KW - LiDAR

KW - Mems mirror

KW - Micromirror

KW - Optical scanner

UR - http://www.scopus.com/inward/record.url?scp=85085726916&partnerID=8YFLogxK

U2 - 10.3390/MI11050456

DO - 10.3390/MI11050456

M3 - Review article

AN - SCOPUS:85085726916

SN - 2072-666X

VL - 11

JO - Micromachines

JF - Micromachines

IS - 5

M1 - 456

ER -

MEMS mirrors for LiDAR: A review

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this