TY - GEN
T1 - MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt
AU - Liu, Lin
AU - Pal, Sagnik
AU - Xie, Huikai
PY - 2011
Y1 - 2011
N2 - We present a curved concentric electrothermal actuator design that has very mall lateral shift and tilting. The actuator is made up of folded curved Al/W bimorphs with fast thermal response and high sensitivity. Two MEMS mirror designs based on this actuator design have been fabricated. The first MEMS mirror is a tip-tilt-piston scanning mirror capable of scanning up to ± 11° at voltage less than 0.6 V, and generating up to 227 m piston displacement at less than 0.8 V. Through the entire piston motion, the lateral shift and the tilt angle of the mirror plate are less than 7 μm and 0.7°, respectively. The second MEMS mirror is a piston scanning mirror with enhanced symmetry, and less than 3 μm lateral shift and less than 0.4° tilt through the entire piston scan range have been achieved. This mirror gives large vertical displacement of about 200 μm at only 0.9 V.
AB - We present a curved concentric electrothermal actuator design that has very mall lateral shift and tilting. The actuator is made up of folded curved Al/W bimorphs with fast thermal response and high sensitivity. Two MEMS mirror designs based on this actuator design have been fabricated. The first MEMS mirror is a tip-tilt-piston scanning mirror capable of scanning up to ± 11° at voltage less than 0.6 V, and generating up to 227 m piston displacement at less than 0.8 V. Through the entire piston motion, the lateral shift and the tilt angle of the mirror plate are less than 7 μm and 0.7°, respectively. The second MEMS mirror is a piston scanning mirror with enhanced symmetry, and less than 3 μm lateral shift and less than 0.4° tilt through the entire piston scan range have been achieved. This mirror gives large vertical displacement of about 200 μm at only 0.9 V.
KW - Al/W bimorph
KW - MEMS mirror
KW - curved concentric bimorph actuator
KW - electrothermal actuation
KW - large piston displacement
KW - lateral shift free
KW - tilt free
UR - http://www.scopus.com/inward/record.url?scp=80052124783&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969759
DO - 10.1109/TRANSDUCERS.2011.5969759
M3 - Conference contribution
AN - SCOPUS:80052124783
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 2522
EP - 2525
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -