MEMS-based optical chemical sensors

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
Publisher	CRC Press
Pages	267-304
Number of pages	38
ISBN (Electronic)	9781439813881
ISBN (Print)	9781138075399
Publication status	Published - 19 Apr 2016
Externally published	Yes

Cite this

@inbook{c275e59e33514148bd43b8f7d84400b1,

title = "MEMS-based optical chemical sensors",

author = "Huikai Xie and Qi, {Zhi Mei}",

year = "2016",

month = apr,

day = "19",

language = "English",

isbn = "9781138075399",

pages = "267--304",

booktitle = "Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications",

publisher = "CRC Press",

}

TY - CHAP

T1 - MEMS-based optical chemical sensors

AU - Xie, Huikai

AU - Qi, Zhi Mei

PY - 2016/4/19

Y1 - 2016/4/19

UR - http://www.scopus.com/inward/record.url?scp=85062315457&partnerID=8YFLogxK

M3 - Chapter

AN - SCOPUS:85062315457

SN - 9781138075399

SP - 267

EP - 304

BT - Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications

PB - CRC Press

ER -