MEMS based endoscopic optical coherence tomography

Huikai Xie; Gary K. Fedder; Yingtian Pan

doi:10.1117/12.597616

MEMS based endoscopic optical coherence tomography

Huikai Xie^*, Gary K. Fedder, Yingtian Pan

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

6 Citations (Scopus)

Abstract

Optical coherence tomography (OCT) is an emerging imaging technique that can provide high-resolution cross-sectional images of biological tissues. OCT has been used to detect various cancers including those in gastrointestinal tracts, bladder, and respiratory pathways. For in vivo imaging in visceral organs, small size and fast speed are essential, which can be achieved by using MEMS (Microelectromechanical systems) technology. In this paper, design and experimental results of a miniature endoscopic OCT imaging probe based on unique single-crystal silicon (SCS) MEMS micromirrors are reported. Several generations of one-dimensional (1D) micromirrors with a size of 1 mm by 1 mm have been fabricated. The resonant frequencies and radii of curvature of the micromirrors are about 0.5 kHz and 0.25 m, respectively. The packaged MEMS-OCT probe is 5 mm in diameter. About 15-μm axial resolutions, 20-μm transverse resolutions and 5-frames/s image rates are obtained.

Original language	English
Article number	09
Pages (from-to)	81-92
Number of pages	12
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5721
DOIs	https://doi.org/10.1117/12.597616
Publication status	Published - 2005
Externally published	Yes
Event	MOEMS Display and Imaging Systems III - San Jose, CA, United States Duration: 24 Jan 2005 → 25 Jan 2005

Keywords

Bimorph
MEMS
Micromirror
OCT
Thermal Actuation

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1117/12.597616

Cite this

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title = "MEMS based endoscopic optical coherence tomography",

abstract = "Optical coherence tomography (OCT) is an emerging imaging technique that can provide high-resolution cross-sectional images of biological tissues. OCT has been used to detect various cancers including those in gastrointestinal tracts, bladder, and respiratory pathways. For in vivo imaging in visceral organs, small size and fast speed are essential, which can be achieved by using MEMS (Microelectromechanical systems) technology. In this paper, design and experimental results of a miniature endoscopic OCT imaging probe based on unique single-crystal silicon (SCS) MEMS micromirrors are reported. Several generations of one-dimensional (1D) micromirrors with a size of 1 mm by 1 mm have been fabricated. The resonant frequencies and radii of curvature of the micromirrors are about 0.5 kHz and 0.25 m, respectively. The packaged MEMS-OCT probe is 5 mm in diameter. About 15-μm axial resolutions, 20-μm transverse resolutions and 5-frames/s image rates are obtained.",

keywords = "Bimorph, MEMS, Micromirror, OCT, Thermal Actuation",

author = "Huikai Xie and Fedder, {Gary K.} and Yingtian Pan",

year = "2005",

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language = "English",

volume = "5721",

pages = "81--92",

journal = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",

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T1 - MEMS based endoscopic optical coherence tomography

AU - Xie, Huikai

AU - Fedder, Gary K.

AU - Pan, Yingtian

PY - 2005

Y1 - 2005

N2 - Optical coherence tomography (OCT) is an emerging imaging technique that can provide high-resolution cross-sectional images of biological tissues. OCT has been used to detect various cancers including those in gastrointestinal tracts, bladder, and respiratory pathways. For in vivo imaging in visceral organs, small size and fast speed are essential, which can be achieved by using MEMS (Microelectromechanical systems) technology. In this paper, design and experimental results of a miniature endoscopic OCT imaging probe based on unique single-crystal silicon (SCS) MEMS micromirrors are reported. Several generations of one-dimensional (1D) micromirrors with a size of 1 mm by 1 mm have been fabricated. The resonant frequencies and radii of curvature of the micromirrors are about 0.5 kHz and 0.25 m, respectively. The packaged MEMS-OCT probe is 5 mm in diameter. About 15-μm axial resolutions, 20-μm transverse resolutions and 5-frames/s image rates are obtained.

AB - Optical coherence tomography (OCT) is an emerging imaging technique that can provide high-resolution cross-sectional images of biological tissues. OCT has been used to detect various cancers including those in gastrointestinal tracts, bladder, and respiratory pathways. For in vivo imaging in visceral organs, small size and fast speed are essential, which can be achieved by using MEMS (Microelectromechanical systems) technology. In this paper, design and experimental results of a miniature endoscopic OCT imaging probe based on unique single-crystal silicon (SCS) MEMS micromirrors are reported. Several generations of one-dimensional (1D) micromirrors with a size of 1 mm by 1 mm have been fabricated. The resonant frequencies and radii of curvature of the micromirrors are about 0.5 kHz and 0.25 m, respectively. The packaged MEMS-OCT probe is 5 mm in diameter. About 15-μm axial resolutions, 20-μm transverse resolutions and 5-frames/s image rates are obtained.

KW - Bimorph

KW - MEMS

KW - Micromirror

KW - OCT

KW - Thermal Actuation

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U2 - 10.1117/12.597616

DO - 10.1117/12.597616

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VL - 5721

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JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

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Y2 - 24 January 2005 through 25 January 2005

ER -

MEMS based endoscopic optical coherence tomography

Abstract

Keywords

UN SDGs

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