MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu; Erkang Wang; Xiaoyang Zhang; Wenxuan Liang; Xingde Li; Huikai Xie

doi:10.1016/j.sna.2013.09.035

MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Lin Liu, Erkang Wang, Xiaoyang Zhang, Wenxuan Liang, Xingde Li, Huikai Xie^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

61 Citations (Scopus)

Abstract

A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

Original language	English
Pages (from-to)	89-95
Number of pages	7
Journal	Sensors and Actuators A: Physical
Volume	215
DOIs	https://doi.org/10.1016/j.sna.2013.09.035
Publication status	Published - 15 Aug 2014
Externally published	Yes

Keywords

3D confocal imaging
3D microendoscope
Bimorph
Electrothermal actuator
MEMS mirror
MEMS tunable lens

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10.1016/j.sna.2013.09.035

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title = "MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan",

abstract = "A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.",

keywords = "3D confocal imaging, 3D microendoscope, Bimorph, Electrothermal actuator, MEMS mirror, MEMS tunable lens",

author = "Lin Liu and Erkang Wang and Xiaoyang Zhang and Wenxuan Liang and Xingde Li and Huikai Xie",

year = "2014",

month = aug,

day = "15",

doi = "10.1016/j.sna.2013.09.035",

language = "English",

volume = "215",

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journal = "Sensors and Actuators A: Physical",

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AU - Liu, Lin

AU - Wang, Erkang

AU - Zhang, Xiaoyang

AU - Liang, Wenxuan

AU - Li, Xingde

AU - Xie, Huikai

PY - 2014/8/15

Y1 - 2014/8/15

N2 - A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

AB - A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

KW - 3D confocal imaging

KW - 3D microendoscope

KW - Bimorph

KW - Electrothermal actuator

KW - MEMS mirror

KW - MEMS tunable lens

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DO - 10.1016/j.sna.2013.09.035

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

Abstract

Keywords

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