Abstract
A system designed for measuring large-size parallelism and perpendicularity of large-size workpieces by laser alignment was developed. This paper mainly focuses on three questions. First, the building of long distance alignment optical beam based on laser diode, single mode optical fiber and phase plate diffraction technique. Second, the building of datum planes that parallel or perpendicular to each other by using pentagonal prism. Third, a new image processing algorithm called orthogonal projection method. The algorithm converts two-dimension image into two one-dimension images, which can speed up the data processing and restrain noise. The performance of this system was tested and verified in National CIMS Engineering Technology Research Center in China. The experimental results show that the relative measurement accuracy of the alignment system attains micron (μm) (0.3×10-6L) in 10 meters measurement range.
Original language | English |
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Article number | 61502H |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 6150 I |
DOIs | |
Publication status | Published - 2006 |
Event | 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Zian, China Duration: 2 Nov 2005 → 5 Nov 2005 |
Keywords
- Large-size measurement
- Parallelism
- Pentagonal prism
- Perpendicularity
- Phase plate
- Single-mode optical fiber