Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

Sagnik Pal; Huikai Xie

doi:10.1109/OMEMS.2009.5338600

Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

Sagnik Pal^*, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

Original language	English
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	55-56
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338600
Publication status	Published - 2009
Externally published	Yes
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: 17 Aug 2009 → 20 Aug 2009

Publication series

Name	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Conference

Conference	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	17/08/09 → 20/08/09

Keywords

Bimorph
Electrothermal actuation
MEMS
Micromirror
PWM
Pulse width modulation

Access to Document

10.1109/OMEMS.2009.5338600

Cite this

Pal, S., & Xie, H. (2009). Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 55-56). Article 5338600 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). https://doi.org/10.1109/OMEMS.2009.5338600

@inproceedings{580e3a8272d54766a310f80615ff82fa,

title = "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive",

abstract = "Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.",

keywords = "Bimorph, Electrothermal actuation, MEMS, Micromirror, PWM, Pulse width modulation",

author = "Sagnik Pal and Huikai Xie",

year = "2009",

doi = "10.1109/OMEMS.2009.5338600",

language = "English",

isbn = "9781424423828",

series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

pages = "55--56",

booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

note = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 ; Conference date: 17-08-2009 Through 20-08-2009",

}

Pal, S & Xie, H 2009, Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338600, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 55-56, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 17/08/09. https://doi.org/10.1109/OMEMS.2009.5338600

Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. / Pal, Sagnik; Xie, Huikai.
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 55-56 5338600 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

AU - Pal, Sagnik

AU - Xie, Huikai

PY - 2009

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N2 - Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

AB - Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

KW - Bimorph

KW - Electrothermal actuation

KW - MEMS

KW - Micromirror

KW - PWM

KW - Pulse width modulation

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DO - 10.1109/OMEMS.2009.5338600

M3 - Conference contribution

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SN - 9781424423828

T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

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BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

T2 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Y2 - 17 August 2009 through 20 August 2009

ER -

Pal S, Xie H. Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 55-56. 5338600. (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). doi: 10.1109/OMEMS.2009.5338600

Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive

Abstract

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Keywords

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