Low stress MEMS delay mechanism

Guozhong Li, Gengchen Shi, Li Sui

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

For the existing symmetry Z-tooth MEMS delay mechanisms can not play sports in place under the influence of centrifugal force, this paper presents an asymmetric Z-tooth delay mechanism which can works reliably by weak environmental forces. Working principle and the stress condition of the mechanism are analyzed. Based on the dynamic model, this paper makes a computational analysis and simulation about the kinetic characteristics of the asymmetric Z-tooth delay mechanism, and the results show that the improved mechanism can works reliably and meets the requirements.

Original languageEnglish
Title of host publicationMicro-Nano Technology XIV
PublisherTrans Tech Publications Ltd.
Pages1489-1494
Number of pages6
ISBN (Print)9783037857397
DOIs
Publication statusPublished - 2013
Event14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 - Hangzhou, China
Duration: 4 Nov 20127 Nov 2012

Publication series

NameKey Engineering Materials
Volume562-565
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012
Country/TerritoryChina
CityHangzhou
Period4/11/127/11/12

Keywords

  • Delay mechanisms
  • MEMS
  • Weak environmental forces
  • Z-tooth

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