Abstract
For the existing symmetry Z-tooth MEMS delay mechanisms can not play sports in place under the influence of centrifugal force, this paper presents an asymmetric Z-tooth delay mechanism which can works reliably by weak environmental forces. Working principle and the stress condition of the mechanism are analyzed. Based on the dynamic model, this paper makes a computational analysis and simulation about the kinetic characteristics of the asymmetric Z-tooth delay mechanism, and the results show that the improved mechanism can works reliably and meets the requirements.
| Original language | English |
|---|---|
| Title of host publication | Micro-Nano Technology XIV |
| Publisher | Trans Tech Publications Ltd. |
| Pages | 1489-1494 |
| Number of pages | 6 |
| ISBN (Print) | 9783037857397 |
| DOIs | |
| Publication status | Published - 2013 |
| Event | 14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 - Hangzhou, China Duration: 4 Nov 2012 → 7 Nov 2012 |
Publication series
| Name | Key Engineering Materials |
|---|---|
| Volume | 562-565 |
| ISSN (Print) | 1013-9826 |
| ISSN (Electronic) | 1662-9795 |
Conference
| Conference | 14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 |
|---|---|
| Country/Territory | China |
| City | Hangzhou |
| Period | 4/11/12 → 7/11/12 |
Keywords
- Delay mechanisms
- MEMS
- Weak environmental forces
- Z-tooth
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Li, G., Shi, G., & Sui, L. (2013). Low stress MEMS delay mechanism. In Micro-Nano Technology XIV (pp. 1489-1494). (Key Engineering Materials; Vol. 562-565). Trans Tech Publications Ltd.. https://doi.org/10.4028/www.scientific.net/KEM.562-565.1489