Liquid phase deposition of hydrogenated diamond-like carbon films on conductive glass substrates using a pulse-modulated source

Jin Ting Jiu, Hao Wang, Kai Cai, Qiang Fu, Chuan Bao Cao, He Sun Zhu

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Abstract

Hydrogenated diamond-like carbon films about 300-500 nm thick were deposited on conductive glass substrates by the electrolysis of a methanol solution, using a pulse-modulated source. The structures of the films were analyzed by XPS, Raman, and IR spectroscopy. The electrical resistivity of the films was in the 1010 Ω cm range, leading to a remarkable decrease in the current density of the substrates at the initial stage of deposition.

Original languageEnglish
Pages (from-to)1501-1506
Number of pages6
JournalMaterials Research Bulletin
Volume34
Issue number10-11
DOIs
Publication statusPublished - 1999

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Jiu, J. T., Wang, H., Cai, K., Fu, Q., Cao, C. B., & Zhu, H. S. (1999). Liquid phase deposition of hydrogenated diamond-like carbon films on conductive glass substrates using a pulse-modulated source. Materials Research Bulletin, 34(10-11), 1501-1506. https://doi.org/10.1016/S0025-5408(99)00174-9