@inproceedings{0da59b99e51b421ebc0c88d110e4e277,
title = "Laser divided-aperture confocal sensor with virtual pinhole detection",
abstract = "A laser divided-aperture confocal sensing technology (LDCST) with virtual pinhole and CCD detection is proposed, which sets illumination pupil and collection pupil symmetrical about the objective optical axis on objective pupil plane, and uses a CCD as detector. LDCST sets a micro-region at focus on the CCD imaging plane as a virtual pinhole, can freely adjust the position and size of the pinhole in the software to match with the sample reflectivity and detector response range in measurements. So, LDCST significantly simplifies the detection system and pinhole adjustment, eliminates the error attributed to the adjustment error of the physical pinhole, and has addition of stray light suppression and sectioning detection capabilities. An LDCST-based laser divided-aperture confocal sensor (LDCS) is developed. Theoretical analyses and preliminary experiments indicate that the LDCS has an axial resolution of about 18.9 nm, a lineal range of about 1.44 μm, and a lateral resolution of about 0.79 μm.",
keywords = "Confocal microscopy, Divided aperture, Virtual detection, Virtual pinhole, sensor",
author = "Chao Liu and Lianqing Zhu and Yun Wang",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 5th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2015 ; Conference date: 05-10-2015 Through 09-10-2015",
year = "2016",
month = mar,
day = "3",
doi = "10.1109/3M-NANO.2015.7425520",
language = "English",
series = "5th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2015 - Conference Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "312--315",
booktitle = "5th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2015 - Conference Proceedings",
address = "United States",
}