Kinematic analysis of a compliant microplatform

Julio Correa*, Carl Crane, Huikai Xie

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Mechanisms formed by rigid elements are not suitable for applications at the microlevel due to manufacturing limitations. For the same reason, devices for microelectromechanical systems (MEMS) are basically planar mechanisms. This paper addresses a microplatform able to move in the three dimensional space. It is formed by bimorph actuators connected to the central platform by compliant elements. The forward and reverse analyses for the microplatform are presented.

Original languageEnglish
Title of host publication2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Pages331-338
Number of pages8
EditionPART A
Publication statusPublished - 2009
Externally publishedYes
Event2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008 - New York City, NY, United States
Duration: 3 Aug 20086 Aug 2008

Publication series

Name2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
NumberPART A
Volume2

Conference

Conference2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Country/TerritoryUnited States
CityNew York City, NY
Period3/08/086/08/08

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