Key techniques in an absolute measurement method of spherical lens

Shuo Wu*, Tao Geng Zhou, Ding Guo Sha, Jia Ming Lin, Lin Feng Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

An absolute measurement method of spherical lens with Fiber Point Diffraction Interferometer (FPDI) was developed. To achieve a high accuracy, several key techniques are discussed such as: short coherence length laser, interferogram collecting, experiment set up, and reconstruction of wave front. Through these techniques an experiment system has been built. The 5-step phase shifting interferograms are collected. The wave front is fitted by Zernike polynomials and reconstructed. The repeated measurement result has a good performance compared to a Zygo GPI interferometer.

Original languageEnglish
Title of host publicationOptical Design and Testing III
DOIs
Publication statusPublished - 2008
EventOptical Design and Testing III - Beijing, China
Duration: 12 Nov 200715 Nov 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6834
ISSN (Print)0277-786X

Conference

ConferenceOptical Design and Testing III
Country/TerritoryChina
CityBeijing
Period12/11/0715/11/07

Keywords

  • Absolute measurement
  • FPDI
  • Optical measurement
  • Point diffraction technique
  • Spherical lens

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