Abstract
In order to realize consistency and low cost in the production process of the exploding foil initiator, the manufacturing method of exploding foil initiator was studied using micro processing technology. Microcrystalline glass was used as substrate, and magnetron sputtering,photolithography and wet etching technology were utilized to product the metal bridge foil on the surface of the substrate. SU-8 photoresist was used as the barrel material and scanning electron microscope was exploited to characterize structure of the initiator. Through the electrical tests, the flyer was successfully generated and after the barrel had a good integrity.
| Original language | English |
|---|---|
| Pages (from-to) | 1207-1210 |
| Number of pages | 4 |
| Journal | Applied Mechanics and Materials |
| Volume | 347-350 |
| DOIs | |
| Publication status | Published - 2013 |
| Event | 2013 International Conference on Precision Mechanical Instruments and Measurement Technology, ICPMIMT 2013 - Shenyang, Liaoning, China Duration: 25 May 2013 → 26 May 2013 |
Keywords
- Initiator
- Micro-electromechanical systems
- SU-8 photoresist
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Lv, J. J., Zeng, Q. X., Li, M. Y., & Yu, Q. X. (2013). Key fabrication technology research of exploding foil initiator. Applied Mechanics and Materials, 347-350, 1207-1210. https://doi.org/10.4028/www.scientific.net/AMM.347-350.1207