Investigation of optical properties of aluminium doped zinc oxide thin films deposited by magnetron sputtering

J. H. Gu, T. Zhang, Z. Y. Zhong, C. Y. Yang, J. Hou

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Aluminium doped zinc oxide (AZO) thin films were prepared by magnetron-sputtering. The optical and structural properties of the films were investigated by optical transmission spectra and X-ray diffraction (XRD) measurements, respectively. The results indicate that the AZO films have hexagonal wurtzite structure with highly c-axis preferred orientation. The optical and structural properties of the films are observed to be subjected to the argon pressure. The AZO film prepared at the argon pressure of 0.5 Pa exhibits the largest crystallite size and the highest average visible transmittance. Also, the refractive index and optical energy-gap of the films were determined by optical characterization methods. The dispersion behavior of the refractive index was studied using the Sellmeier's dispersion model.

Original languageEnglish
Title of host publicationAdvanced Research in Material Science and Mechanical Engineering
Pages259-262
Number of pages4
DOIs
Publication statusPublished - 2014
Externally publishedYes
Event2013 2nd International Conference on Mechanics and Control Engineering, ICMCE 2013 - Beijing, China
Duration: 1 Sept 20132 Sept 2013

Publication series

NameApplied Mechanics and Materials
Volume446-447
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Conference

Conference2013 2nd International Conference on Mechanics and Control Engineering, ICMCE 2013
Country/TerritoryChina
CityBeijing
Period1/09/132/09/13

Keywords

  • Aluminium doped zinc oxide
  • Magnetron sputtering
  • Optical properties
  • Thin films

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