Internal structuring of silicon with multi-timescale irradiations

Amlan Das; Andong Wang; Olivier Utéza; David Grojo

Internal structuring of silicon with multi-timescale irradiations

Amlan Das, Andong Wang, Olivier Utéza, David Grojo

Aix-Marseille Université

Research output: Contribution to journal › Conference article › peer-review

Abstract

By combining and synchronizing pulses of different durations from 170 fs to 5 ns, we benchmark the appropriate temporal characteristics of laser pulses for 3D writing applications inside silicon.

Original language	English
Article number	SM3B.6
Journal	Optics InfoBase Conference Papers
Publication status	Published - 2021
Externally published	Yes
Event	CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States Duration: 9 May 2021 → 14 May 2021

Cite this

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title = "Internal structuring of silicon with multi-timescale irradiations",

abstract = "By combining and synchronizing pulses of different durations from 170 fs to 5 ns, we benchmark the appropriate temporal characteristics of laser pulses for 3D writing applications inside silicon.",

author = "Amlan Das and Andong Wang and Olivier Ut{\'e}za and David Grojo",

note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",

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language = "English",

journal = "Optics InfoBase Conference Papers",

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AU - Das, Amlan

AU - Wang, Andong

AU - Utéza, Olivier

AU - Grojo, David

PY - 2021

Y1 - 2021

N2 - By combining and synchronizing pulses of different durations from 170 fs to 5 ns, we benchmark the appropriate temporal characteristics of laser pulses for 3D writing applications inside silicon.

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M3 - Conference article

AN - SCOPUS:85120079717

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - SM3B.6

T2 - CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021

Y2 - 9 May 2021 through 14 May 2021

ER -

Internal structuring of silicon with multi-timescale irradiations

Abstract

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