Integrated microelectromechanical gyroscopes

Huikai Xie; Gary K. Fedder

doi:10.1061/(ASCE)0893-1321(2003)16:2(65)

Integrated microelectromechanical gyroscopes

Huikai Xie^*, Gary K. Fedder

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

90 Citations (Scopus)

Abstract

Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.

Original language	English
Pages (from-to)	65-75
Number of pages	11
Journal	Journal of Aerospace Engineering
Volume	16
Issue number	2
DOIs	https://doi.org/10.1061/(ASCE)0893-1321(2003)16:2(65)
Publication status	Published - Apr 2003
Externally published	Yes

Keywords

Design
Electronic equipment
Fabrication
Micromechanics
Sensors

Access to Document

10.1061/(ASCE)0893-1321(2003)16:2(65)

Cite this

@article{5f4117ad1aa340b9b44c12ada870ceae,

title = "Integrated microelectromechanical gyroscopes",

abstract = "Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.",

keywords = "Design, Electronic equipment, Fabrication, Micromechanics, Sensors",

author = "Huikai Xie and Fedder, {Gary K.}",

year = "2003",

month = apr,

doi = "10.1061/(ASCE)0893-1321(2003)16:2(65)",

language = "English",

volume = "16",

pages = "65--75",

journal = "Journal of Aerospace Engineering",

issn = "0893-1321",

publisher = "American Society of Civil Engineers (ASCE)",

number = "2",

}

TY - JOUR

T1 - Integrated microelectromechanical gyroscopes

AU - Xie, Huikai

AU - Fedder, Gary K.

PY - 2003/4

Y1 - 2003/4

N2 - Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.

AB - Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.

KW - Design

KW - Electronic equipment

KW - Fabrication

KW - Micromechanics

KW - Sensors

UR - http://www.scopus.com/inward/record.url?scp=13944279234&partnerID=8YFLogxK

U2 - 10.1061/(ASCE)0893-1321(2003)16:2(65)

DO - 10.1061/(ASCE)0893-1321(2003)16:2(65)

M3 - Article

AN - SCOPUS:13944279234

SN - 0893-1321

VL - 16

SP - 65

EP - 75

JO - Journal of Aerospace Engineering

JF - Journal of Aerospace Engineering

IS - 2

ER -

Integrated microelectromechanical gyroscopes

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this