In vivo 3D and doppler OCT imaging using electrothermal MEMS scanning mirrors

Jingjing Sun*, Shuguang Guo, Lei Wu, Se Woon Choe, Brian Sorg, Huikai Xie

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

Most cancers occur inside human body, so endoscopic high-resolution imaging modalities are required for early cancer detection and surgical removal. This paper reports in vivo endoscopic 3D imaging based on optical coherence tomography (OCT). Endoscopic imaging is enabled by integrating rapid-scanning MEMS mirror into a miniature imaging probe. The MEMS mirror has an aperture size of 1 mm by 1 mm and a chip size of 2 mm by 2 mm. The optical scan angle exceeds ±25 V at 6 Vdc, and thus large, constant-velocity, linear scan can be realized. The outer diameter of the probe is only 5 mm. The axial resolution is about 10 μm and the imaging speed is 2.5 frames per second. Doppler OCT imaging has also been demonstrated.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems IX
DOIs
Publication statusPublished - 2010
Externally publishedYes
EventMOEMS and Miniaturized Systems IX - San Francisco, CA, United States
Duration: 25 Jan 201027 Jan 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7594
ISSN (Print)0277-786X

Conference

ConferenceMOEMS and Miniaturized Systems IX
Country/TerritoryUnited States
CitySan Francisco, CA
Period25/01/1027/01/10

Keywords

  • Electrothermal actuation
  • Endoscopy
  • MEMS
  • Micromirrors
  • Optical MEMS
  • Optical coherence tomography
  • Optical imaging

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