Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application

Dingbang Xiao; Xin Zhou; Qingsong Li; Zhanqiang Hou; Yulie Wu; Wei Li; Xinghua Wang; Jinying Zhang; Xuezhong Wu

doi:10.1109/MEMSYS.2017.7863612

Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application

Dingbang Xiao, Xin Zhou, Qingsong Li, Zhanqiang Hou, Yulie Wu, Wei Li, Xinghua Wang, Jinying Zhang, Xuezhong Wu^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

15 Citations (Scopus)

Abstract

This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant frequency which results in superiorities in robustness to the environment disturbance and mechanical resolution.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1126-1129
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863612
Publication status	Published - 23 Feb 2017
Externally published	Yes
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

Access to Document

10.1109/MEMSYS.2017.7863612

Cite this

Xiao, D., Zhou, X., Li, Q., Hou, Z., Wu, Y., Li, W., Wang, X., Zhang, J., & Wu, X. (2017). Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 1126-1129). Article 7863612 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863612

Xiao, Dingbang ; Zhou, Xin ; Li, Qingsong et al. / Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1126-1129 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{e7efae91678e4f0b9cb060a0f0dea4da,

title = "Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application",

abstract = "This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant frequency which results in superiorities in robustness to the environment disturbance and mechanical resolution.",

author = "Dingbang Xiao and Xin Zhou and Qingsong Li and Zhanqiang Hou and Yulie Wu and Wei Li and Xinghua Wang and Jinying Zhang and Xuezhong Wu",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863612",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1126--1129",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

address = "United States",

}

Xiao, D, Zhou, X, Li, Q, Hou, Z, Wu, Y, Li, W, Wang, X, Zhang, J & Wu, X 2017, Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863612, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1126-1129, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863612

Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application. / Xiao, Dingbang; Zhou, Xin; Li, Qingsong et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1126-1129 7863612 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application

AU - Xiao, Dingbang

AU - Zhou, Xin

AU - Li, Qingsong

AU - Hou, Zhanqiang

AU - Wu, Yulie

AU - Li, Wei

AU - Wang, Xinghua

AU - Zhang, Jinying

AU - Wu, Xuezhong

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant frequency which results in superiorities in robustness to the environment disturbance and mechanical resolution.

AB - This paper reports a novel honeycomb-like disk resonator for gyroscopic application. Compared with the state of the art nested-rings disk resonator, the honeycomb-like disk resonator can provide more than two-fold higher immunity to the fabrication error, which means that structure imperfection could cause less relative frequency error. The honeycomb-like disk resonator also shows much higher resonant frequency which results in superiorities in robustness to the environment disturbance and mechanical resolution.

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U2 - 10.1109/MEMSYS.2017.7863612

DO - 10.1109/MEMSYS.2017.7863612

M3 - Conference contribution

AN - SCOPUS:85015736012

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1126

EP - 1129

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Xiao D, Zhou X, Li Q, Hou Z, Wu Y, Li W et al. Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1126-1129. 7863612. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863612

Honeycomb-like disk resonator with high immunity to fabrication error for gyroscopic application

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