Holographie illumination in optical readout focal plane array infrared imaging system

An IR imaging system based on a microelectromechanical system (MEMS) microcantilever is uncooled, lowcost, and more reliable than traditional systems. However, it is difficult to avoid unwanted shape distortions in fabrication, which can degrade image quality in many ways, so we use holography to compensate for these shape distortions in an optical readout focal plane array (FPA) IR imaging system. The experiment shows that it is a feasible way to improve system performance, especially when it is too difficult to perfect the techniques of an FPA fabrication.