High Uniformity Ferroelectric MoS2Nonvolatile Memory Array

Chunyang Li, Lu Li, Zhongyi Li, Fanqing Zhang, Lixin Dong*, Jing Zhao*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Ferroelectric field effect transistor (FeFET) based on two-dimensional (2D) materials is centered great expectations for next-generation non-volatile memory devices owing to its excellent properties. In this paper, we fabricated monolayer MoS2 FeFET devices array through coupling ferroelectric P(VDF-TrFE) as the dielectric layer. The MoS2 FeFET device demonstrated excellent storage performance, including high on/off current ratios (> 106, a broad memory window (15 V), long endurance (>200 cycles), and retention time (>1000 s). In additional, attributed to the chemical vapor deposition (CVD) synthesis of large-scale uniform Mos2,the devices array shows consistent characteristics, which suggest huge potential integrated circuit applications in the future.

Original languageEnglish
Title of host publication2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Proceedings
EditorsZhidong Wang, Li Lei, Fan Yang
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages247-251
Number of pages5
ISBN (Electronic)9781665475433
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Tianjin, China
Duration: 8 Aug 202212 Aug 2022

Publication series

Name2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022 - Proceedings

Conference

Conference2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2022
Country/TerritoryChina
CityTianjin
Period8/08/2212/08/22

Keywords

  • P(VDF-TrFE)
  • devices array
  • ferroelectric field effect transistor
  • large-scale
  • non-volatile memory

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