High resolution torsion balance angle deviation measurement based on phase sensitive CP-SDOCT

Mingming Dong, Zheng Yan, Yong Huang*, Qun Hao

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Torsion balance system as a high precision important ultra-small force measurement tool usually requires ultra-high-resolution deviation measurement of the torsion angle. Currently, autocollimators are used for the torsion angle deviation measurement. Optical coherence tomography (OCT) is a high-resolution three-dimensional imaging technology, which has the characteristics of real-time imaging of samples with micron or sub-micron resolution at millimeter depth, and is widely used in biomedical research and industrial detection fields. In this work, utilizing the single-mode fiber based common-path OCT system architecture, we design and fabricate a compact probe that consists of four displacement sensing fibers connected to one home-built SD-OCT system with a central wavelength of 840 nm. Each fiber senses the distance between the fiber tip and torsion balance integrated reflection mirror. The distance peaks from each fiber are designed to be distributed along system one A-scan depth which enables simultaneous measurement. With the phase sensitive reconstruction algorithm, tens of pm distance sensing resolution can be achieved. Analyzing the displacement values from four distributed spatial points, the torsion principle surface can be reconstructed for post experiment analysis. We believe our proposed work will be valuable for distributed ultra-high resolution compact and stable displacement sensing.

Original languageEnglish
Title of host publicationOptical Metrology and Inspection for Industrial Applications XI
EditorsSen Han, Sen Han, Gerd Ehret, Benyong Chen
PublisherSPIE
ISBN (Electronic)9781510682108
DOIs
Publication statusPublished - 2024
EventOptical Metrology and Inspection for Industrial Applications XI 2024 - Nantong, China
Duration: 12 Oct 202414 Oct 2024

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13241
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Metrology and Inspection for Industrial Applications XI 2024
Country/TerritoryChina
CityNantong
Period12/10/2414/10/24

Keywords

  • inclination of plane
  • micro angle detection
  • optical coherence tomography
  • phase sensitive
  • torsion balance system

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