FPGA-based test equipment for system-level MEMS switch series

Peng Liu; Wenzhong Lou; Yufei Lu; Xinyu Feng

doi:10.4028/www.scientific.net/KEM.645-646.572

FPGA-based test equipment for system-level MEMS switch series

Peng Liu^*, Wenzhong Lou, Yufei Lu, Xinyu Feng

^*Corresponding author for this work

School of Mechatronical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

Original language	English
Pages (from-to)	572-576
Number of pages	5
Journal	Key Engineering Materials
Volume	645
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.645-646.572
Publication status	Published - 1 May 2015

Keywords

FPGA
MEMS switch series
Test equipment system
Testing algorithms

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Cite this

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title = "FPGA-based test equipment for system-level MEMS switch series",

abstract = "A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.",

keywords = "FPGA, MEMS switch series, Test equipment system, Testing algorithms",

author = "Peng Liu and Wenzhong Lou and Yufei Lu and Xinyu Feng",

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AU - Lou, Wenzhong

AU - Lu, Yufei

AU - Feng, Xinyu

N1 - Publisher Copyright: © (2015) Trans Tech Publications, Switzerland.

PY - 2015/5/1

Y1 - 2015/5/1

N2 - A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

AB - A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

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KW - MEMS switch series

KW - Test equipment system

KW - Testing algorithms

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JO - Key Engineering Materials

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FPGA-based test equipment for system-level MEMS switch series

Abstract

Keywords

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