Abstract
Optical micro-scanner and its amplifier structure based on ferroelectric ceramics as well as flexible hinge is presented; and the properties of single-axis and flexible hinge analyzed. Finite element method is then used to simulate the flexible hinge magnification of the optical micro-scanner. It shows that when the minimum thickness of flexible hinge is twice the radius of arc, the micro-scanner structure can perform stable displacement, while the magnification ratio is enhanced to 3.25 times the displacement given by ferroelectric ceramics. The rationality of magnifying structure is thus validated exactly.
| Original language | English |
|---|---|
| Pages (from-to) | 1003-1007 |
| Number of pages | 5 |
| Journal | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| Volume | 28 |
| Issue number | 11 |
| Publication status | Published - Nov 2008 |
Keywords
- Finite element analysis
- Flexible hinge
- Micro-scanner