Failure of a MEMS switch after environmental test

Ding Xuran; Feng Yue; Lou Wenzhong; Guo Yunlong

doi:10.1109/NEMS.2015.7147457

Failure of a MEMS switch after environmental test

Ding Xuran^*, Feng Yue, Lou Wenzhong, Guo Yunlong

^*Corresponding author for this work

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

Original language	English
Title of host publication	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	417-420
Number of pages	4
ISBN (Electronic)	9781467366953
DOIs	https://doi.org/10.1109/NEMS.2015.7147457
Publication status	Published - 1 Jul 2015
Event	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 - Xi'an, China Duration: 7 Apr 2015 → 11 Apr 2015

Publication series

Name	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

Conference

Conference	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Country/Territory	China
City	Xi'an
Period	7/04/15 → 11/04/15

Keywords

MEMS switch
environmental test
failure

Access to Document

10.1109/NEMS.2015.7147457

Cite this

Xuran, D., Yue, F., Wenzhong, L., & Yunlong, G. (2015). Failure of a MEMS switch after environmental test. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 (pp. 417-420). Article 7147457 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2015.7147457

Xuran, Ding ; Yue, Feng ; Wenzhong, Lou et al. / Failure of a MEMS switch after environmental test. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 417-420 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

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title = "Failure of a MEMS switch after environmental test",

abstract = "A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.",

keywords = "MEMS switch, environmental test, failure",

author = "Ding Xuran and Feng Yue and Lou Wenzhong and Guo Yunlong",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",

year = "2015",

month = jul,

day = "1",

doi = "10.1109/NEMS.2015.7147457",

language = "English",

series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Xuran, D, Yue, F, Wenzhong, L & Yunlong, G 2015, Failure of a MEMS switch after environmental test. in 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015., 7147457, 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 417-420, 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, 7/04/15. https://doi.org/10.1109/NEMS.2015.7147457

Failure of a MEMS switch after environmental test. / Xuran, Ding; Yue, Feng; Wenzhong, Lou et al.
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 417-420 7147457 (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Failure of a MEMS switch after environmental test

AU - Xuran, Ding

AU - Yue, Feng

AU - Wenzhong, Lou

AU - Yunlong, Guo

PY - 2015/7/1

Y1 - 2015/7/1

N2 - A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

AB - A MEMS switch based on electro-Thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.

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BT - 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 7 April 2015 through 11 April 2015

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Xuran D, Yue F, Wenzhong L, Yunlong G. Failure of a MEMS switch after environmental test. In 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 417-420. 7147457. (2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015). doi: 10.1109/NEMS.2015.7147457

Failure of a MEMS switch after environmental test

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