Fabrication of PZT thick film by two spin-coating methods based on Sol-Gel

Two spin-coating methods of depositing PZT (Pb(Zr _0.52Ti _0.48)O ₃) thick film on Au/Cr/SiO ₂/Si substrate by sol-gel have been investigated in this paper. PZT nano powder which is identical with the PZT clear sol in composition dispersed into PZT clear sol and mixed by ultrasonic processing obtained PZT sol suspension, the grain size of PZT nanopowder is approximately 50~100 nm. The XRD analysis indicates that the both thick films possess single perovskite phase structure. The SEM micrographs show that the surface of first thick film is coarse and the second thick film is dense, uniform and crack-free. Their thicknesses are both about 4 μm. The ferroelectric hysteresis loops of both PZT thick films, which were tested under the frequency of 1 kHz, show that they have the coercive field of 30 kV/cm and 50 kV/cm, the saturation polarization of 45mu;C/cm ² and 54 μC/cm ², the remnant polarization of 25μC/cm ² and 30 μC/cm ², respectively, the second thick film has higher direct current compression resistant properties, keeps good ferroelectric properties under electric field intensity of 300 kV/cm. Thus, the second spin-coating method could improve the surface morphology and the ferroelectric properties of PZT thick film.