Fabrication of periodically-curved micro/nano grating structures on sapphire surface using femtosecond laser pulses

Ben Niu, Jie Hu*, Yu Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Sapphire is a widely used material, but is difficult to process by using mechanical or chemical methods. We used a femtosecond laser to fabricate highly curved periodic micro/nano grating structures on a sapphire surface. The effects of laser repetition rate, laser scanning speed, laser polarization direction and scanning direction, and laser fluence on the resulting curved grating were studied. Finite difference time domain (FDTD) simulation software was used to investigate the formation of the curved grating and explain the reason for the formation of the structure being dependent on the distance between two adjacent pulses, which is determined by the scanning speed. This method can be used to process complex patterns with structural colors on a sapphire surface, and different colors could be observed from different angles under white light.

Original languageEnglish
Title of host publicationInternational Conference on Laser, Optics and Optoelectronic Technology, LOPET 2021
EditorsChangsi Peng, Fengjie Cen
PublisherSPIE
ISBN (Electronic)9781510646162
DOIs
Publication statusPublished - 2021
Event2021 International Conference on Laser, Optics and Optoelectronic Technology, LOPET 2021 - Xi'an, China
Duration: 28 May 202130 May 2021

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11885
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference2021 International Conference on Laser, Optics and Optoelectronic Technology, LOPET 2021
Country/TerritoryChina
CityXi'an
Period28/05/2130/05/21

Keywords

  • Curved grating
  • Femtosecond laser
  • Sapphire

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Niu, B., Hu, J., & Chen, Y. (2021). Fabrication of periodically-curved micro/nano grating structures on sapphire surface using femtosecond laser pulses. In C. Peng, & F. Cen (Eds.), International Conference on Laser, Optics and Optoelectronic Technology, LOPET 2021 Article 118850B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11885). SPIE. https://doi.org/10.1117/12.2602408