Fabrication of large-vector height aspheric microlens via tool swing stitching processing

Tianxing Wang, Tianfeng Zhou*, Jia Zhou, Benshuai Ruan, Wenxiang Zhao, Xibin Wang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

Microlens elements are widely applied in various beam processing applications. However, due to the geometric limitations of the cutting tool and the degrees of freedom of the machine tool, the traditional cutting strategy cannot be employed to fabricate high quality large-vector height microlens. In this paper, a method based on the tool swing cutting and stitching processing is presented. The interference situation and the relationship between the tool parameters and microlens vector height are analyzed. The analysis shows that this method can improve the microlens vector height by about 2 times compared to the slow tool servo. Then the influence of tool setting error on stitching accuracy is studied, and an accurate tool setting method combining CCD tool setting and trial cutting is proposed. Finally, the microlens are experimentally machined to reveal that this method is possible to fabricate microlens with large-vector height and high surface quality.

Original languageEnglish
Title of host publicationSeventh Asia Pacific Conference on Optics Manufacture, APCOM 2021
EditorsJiubin Tan, Xiangang Luo, Ming Huang, Lingbao Kong, Dawei Zhang
PublisherSPIE
ISBN (Electronic)9781510652088
DOIs
Publication statusPublished - 2022
Event7th Asia Pacific Conference on Optics Manufacture, APCOM 2021 - Shanghai, China
Duration: 28 Oct 202131 Oct 2021

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12166
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference7th Asia Pacific Conference on Optics Manufacture, APCOM 2021
Country/TerritoryChina
CityShanghai
Period28/10/2131/10/21

Keywords

  • Microlens
  • Stitching processing
  • Tool setting
  • Tool swing cutting
  • Ultra-precision cutting

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